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AIMS Materials Science

2018, Volume 5, Issue 5: 957-999. doi: 10.3934/matersci.2018.5.957
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Novel nanostructured materials by atomic and molecular layer deposition

  • Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, the United States
  • Received: 13 August 2018 Accepted: 10 October 2018 Published: 24 October 2018

  • Nanostructured materials (NMs) are the materials with a microscopic structure of 1–100 nanometers. NMs can outperform their bulk counterparts, due to their reduced sizes. In terms of dimensionality, NMs can be classified into zero-dimension (0D), 1D, 2D, and 3D. Atomic and molecular layer deposition (i.e., ALD and MLD) are two unique techniques for fabricating and designing novel NMs, featuring their unique capabilities for material growth with excellent uniformity, unrivaled conformal coverage, and precise controllability at low temperature. As a result, a large variety of NMs by ALD and MLD have found applications in a wide range of areas. In this work, we focus on summarizing the strategies of ALD and MLD for various NMs and exemplify their applications in surface engineering and new energies.

    Citation: Jiyu Cai, Qian Sun, Xiangbo Meng. Novel nanostructured materials by atomic and molecular layer deposition[J]. AIMS Materials Science, 2018, 5(5): 957-999. doi: 10.3934/matersci.2018.5.957

    Related Papers:

  • Nanostructured materials (NMs) are the materials with a microscopic structure of 1–100 nanometers. NMs can outperform their bulk counterparts, due to their reduced sizes. In terms of dimensionality, NMs can be classified into zero-dimension (0D), 1D, 2D, and 3D. Atomic and molecular layer deposition (i.e., ALD and MLD) are two unique techniques for fabricating and designing novel NMs, featuring their unique capabilities for material growth with excellent uniformity, unrivaled conformal coverage, and precise controllability at low temperature. As a result, a large variety of NMs by ALD and MLD have found applications in a wide range of areas. In this work, we focus on summarizing the strategies of ALD and MLD for various NMs and exemplify their applications in surface engineering and new energies.


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