Research article Topical Sections

Surface characteristics and damage distributions of diamond wire sawn wafers for silicon solar cells

  • Received: 20 April 2016 Accepted: 08 June 2016 Published: 12 June 2016
  • This paper describes surface characteristics, in terms of its morphology, roughness and near-surface damage of Si wafers cut by diamond wire sawing (DWS) of Si ingots under different cutting conditions. Diamond wire sawn Si wafers exhibit nearly-periodic surface features of different spatial wavelengths, which correspond to kinematics of various movements during wafering, such as ingot feed, wire reciprocation, and wire snap. The surface damage occurs in the form of frozen-in dislocations, phase changes, and microcracks. The in-depth damage was determined by conventional methods such as TEM, SEM and angle-polishing/defect-etching. However, because these methods only provide local information, we have also applied a new technique that determines average damage depth over a large area. This technique uses sequential measurement of the minority carrier lifetime after etching thin layers from the surfaces. The lateral spatial damage variations, which seem to be mainly related to wire reciprocation process, were observed by photoluminescence and minority carrier lifetime mapping. Our results show a strong correlation of damage depth on the diamond grit size and wire usage.

    Citation: Bhushan Sopori, Srinivas Devayajanam, Prakash Basnyat. Surface characteristics and damage distributions of diamond wire sawn wafers for silicon solar cells[J]. AIMS Materials Science, 2016, 3(2): 669-685. doi: 10.3934/matersci.2016.2.669

    Related Papers:

  • This paper describes surface characteristics, in terms of its morphology, roughness and near-surface damage of Si wafers cut by diamond wire sawing (DWS) of Si ingots under different cutting conditions. Diamond wire sawn Si wafers exhibit nearly-periodic surface features of different spatial wavelengths, which correspond to kinematics of various movements during wafering, such as ingot feed, wire reciprocation, and wire snap. The surface damage occurs in the form of frozen-in dislocations, phase changes, and microcracks. The in-depth damage was determined by conventional methods such as TEM, SEM and angle-polishing/defect-etching. However, because these methods only provide local information, we have also applied a new technique that determines average damage depth over a large area. This technique uses sequential measurement of the minority carrier lifetime after etching thin layers from the surfaces. The lateral spatial damage variations, which seem to be mainly related to wire reciprocation process, were observed by photoluminescence and minority carrier lifetime mapping. Our results show a strong correlation of damage depth on the diamond grit size and wire usage.


    加载中
    [1] Clark W, Shih A, Hardin C, et al. (2003) Fixed abrasive diamond wire machining—part I: process monitoring and wire tension force. Int J Mach Tool Manu 43: 523–532. doi: 10.1016/S0890-6955(02)00215-8
    [2] Yu X, Wang P, Li X, et al. (2012) Thin Czochralski silicon solar cells based on diamond wire sawing technology. Sol Energ Mater Sol C 98: 337–342. doi: 10.1016/j.solmat.2011.11.028
    [3] Möller H (2006) Wafering of silicon crystals. Phys Stat Sol 203: 659–669. doi: 10.1002/pssa.200564508
    [4] Sopori B, Devayajanam S, Shet S, et al. (2013) Characterizing damage on Si wafer surfaces cut by slurry and diamond wire sawing. Proceedings of 39th IEEE PVSC 2013, Tampa, Florida, pp. 0945–0950.
    [5] Sopori B, Basnyat P, Devayajanam S, et al. (2015) Analyses of diamond wire sawn wafers: Effect of various cutting parameters. Proceedings of 42nd IEEE PVSC 2015, New Orleans, Louisiana.
    [6] De Meyer C, Heim B, Riddle Y (2012) Diamond wire wafering: A tutorial, 22nd Silicon Workshop, July 22–25, 2012, Vail, Colorado, USA.
    [7] Bidiville A, Wasmer K, Kraft R, et al. (2009) Diamond wire-sawn silicon wafers – from the lab to the cell production. Presented at the 24th European Photovoltaic Solar Energy Conference and Exhibition, 21–25 September 2009, Hamburg, Germany, pp. 1400–1405.
    [8] Teomete E (2008) Mechanics of wire saw machining process: experimental analyses and modeling, Ph. D. thesis, Iowa State University.
    [9] Sopori B, Devayajanam S, Basnyat P (2015) Using minority carrier lifetime measurement to determine saw damage characteristics on Si wafer surfaces. Proceedings of 42nd IEEE PVSC 2015, New Orleans, Louisiana.
    [10] Wurzner S, Buchwald R, Mӧller H (2015) Surface damage and mechanical strength of silicon wafers. Phys Status Solidi C 12: 1119–1122. doi: 10.1002/pssc.201400227
    [11] Arif M, Rahman M, San W (2012) A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries. Int J Adv Manuf Technol 63:481–504. doi: 10.1007/s00170-012-3937-2
    [12] Blake P, Scattergood R (1990) Ductile- regime machining of germanium and silicon. J Am Ceram Soc 73: 949–957. doi: 10.1111/j.1151-2916.1990.tb05142.x
    [13] Ravindra D, Virkar S, Patten J (2011) Ductile mode micro laser assisted machining of silicon carbide in properties and applications of silicon carbide, Edited by Rosario Gerhardt, ISBN 978-953-307-201-2, 546 pages, Publisher: InTech, Chapters published.
    [14] Bidiville A, Wasmer K, Meer M, et al. (2015) Wire-sawing processes: parametrical study and modeling. Sol Energ Mater Sol C 132: 392–402. doi: 10.1016/j.solmat.2014.09.019
    [15] Donmich V, Gogotsi Y (2002) Phase transformation in silicon under contact loading. Rev Adv Mater Sci 3: 1–36. doi: 10.1016/S1468-6996(01)00150-4
    [16] Sopori B, Devayajanam S, Basnyat P (2016) A method for determining average damage depth of sawn crystalline silicon wafers. Rev Sc Inst 87: 45104. doi: 10.1063/1.4944792
    [17] Sopori B, Devayajanam S, Basnyat P, et al. (2015) Surface damage introduced by diamond wire sawing of Si wafers: Measuring in-depth and the lateral distributions for different cutting parameters. Mater Res Soc Symp Proc 1770: 61–66. doi: 10.1557/opl.2015.830
    [18] Choi C, Lee J, Cho S, et al. (1998) Evaluation of mechanical damage by high resolution X-ray diffraction and minority carrier lifetime. J Appl Phys 84: 168–173. doi: 10.1063/1.368073
    [19] Watanabe N, Kondo Y, Idle D, et al. (2010) Characterization of polycrystalline silicon wafers for solar cells sliced with novel fixed-abrasive wire. Prog Photovolt Res Appl 18: 485–490. doi: 10.1002/pip.923
    [20] Sopori B (1980) Rapid nondestructive technique for monitoring polishing damage in semiconductor wafers. Rev Sc Inst 50: 1513–1515.
    [21] Park H, Kwon S, Lee J, et al. (2009) Improvement on surface texturing of single crystalline silicon for solar cells by saw-damage etching using an acidic solution. Sol Energ Mater Sol C 93: 1773–1778.
  • Reader Comments
  • © 2016 the Author(s), licensee AIMS Press. This is an open access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0)
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索

Metrics

Article views(7488) PDF downloads(2008) Cited by(15)

Article outline

Figures and Tables

Figures(16)  /  Tables(1)

/

DownLoad:  Full-Size Img  PowerPoint
Return
Return

Catalog